Daily Abbreviations

良率掉到 N%(被動下滑)。drop 是最常用的動詞,fall 較正式,dip 暗示短期。

• Yield dropped to 78% on lot Q3-218 — escalating now.
• We saw the yield dip to 85% over the weekend, recovered Monday.

良率上升 N%。improve 中性、climb 暗示緩步上升、recover 則是「掉下去之後拉回來」。

• Yield improved by 3% after the recipe re-cal.
• Yield recovered to baseline within two days.

良率被 [因子] 影響。is impacted by 中性,is hit by 暗示嚴重,is sensitive to 強調容易飄。

• Final yield is impacted by overlay drift on M3.
• This product is highly sensitive to chamber temperature.

缺陷以 [症狀] 顯現。manifest 學術正式,shows up 口語,appears 中性。寫 deviation report 多用 manifest。

• The defect manifests as a ring pattern at the wafer edge.
• It shows up as bin 7 fail at FT but not at CP.

配方被重新校正 / 鎖定 / 微調 / 飄移。re-cal'd = recalibrated,口語縮寫,正式報告寫 recalibrated。

• The recipe was re-cal'd this morning, monitor for 48 hours.
• Recipe is locked — no changes without ECN.

Cpk 劣化或跌破門檻(通常 1.33)。degrades 比 drops 更暗示「逐步」變差。

• Cpk degraded from 1.5 to 1.18 over four weeks.
• Cpk dropped below the 1.33 threshold — initiating containment.

規格上下限被收緊 / 放寬 / 重新檢視。客戶要求規格越收越緊是常態。

• Customer asked us to tighten the breakdown voltage limits.
• We loosened the upper limit by 5% after process re-qual.

異常被遏止 / 升級 / 結案 / 開立。Containment 是 PQA 的關鍵動作 — 防止已知不良流到下一站或客戶。

• The excursion is contained at WAT — nothing shipped.
• Escalating this excursion to senior management; customer impact possible.

根因已確認 / 待釐清 / 懷疑中 / 確認。8D step 4 的核心動詞。

• Root cause is identified as a clogged slurry filter.
• Root cause is pending — preliminary suspect is the new lot of pad.

lot 被卡住 / 放行 / 報廢 / 改流程。

• The lot is held pending FA confirmation.
• Released the lot after PQA review — no customer impact.

deviation report · 觀察

We observed symptom on lot lot_id starting at the step step.

我們在 {批號} 從 {製程站} 開始觀察到 {症狀}。Deviation report 第一段最常用的開場句。

• We observed an edge ring particle pattern on lot Q3-218 starting at the M2 photo step.▸ 聽念法
• We observed Vt shift of +50 mV on lot 1842 starting at the well implant step.▸ 聽念法

8D · root cause statement

The issue is attributed to root_cause, based on evidence.

{問題} 歸因於 {根因},依據是 {證據}。是 8D step 4(D4 — Identify Root Cause)的標準寫法。

• The CD shift is attributed to a chamber pressure drift, based on the SPC trend and DOE results.▸ 聽念法
• The yield drop is attributed to a clogged slurry filter, based on the FA cross-section.▸ 聽念法

8D · D3 + D5

Containment action: immediate_step. Long-term action: permanent_fix.

暫時 containment 動作:{立即步驟}。長期改善:{永久修正}。8D D3 + D5 的合併寫法。

• Containment action: hold all lots from chamber A. Long-term action: install in-line pressure monitoring with alarm.▸ 聽念法
• Containment action: 100% inspection on all WIP. Long-term action: redesign the slurry delivery system.▸ 聽念法

yield review · opening

Yield came in N% below the running average on this product / lot.

本批 / 本產品的良率比 running average 低 {N}%。Yield review 開場常用。

• Yield came in 4% below the running average on the 28nm SoC product.▸ 聽念法
• Yield came in 8% below baseline on lot Q3-218 — investigating now.▸ 聽念法

PQA disposition recommendation

Recommend action pending investigation.

建議 {動作},等待 {調查} 結果。PQA 對 lot disposition 的標準推薦句。

• Recommend hold pending FA cross-section confirmation.▸ 聽念法
• Recommend release pending acceptance of the deviation by the customer.▸ 聽念法

customer escalation · impact assessment

Customer impact assessment: assessment. N units already shipped / under containment.

客戶衝擊評估:{評估}。已出貨 / 已遏止 {N} 顆。客訴 / spill 處理用。

• Customer impact assessment: pending FA. 1,200 units shipped, none returned yet.▸ 聽念法
• Customer impact assessment: low risk. 0 units shipped — all under containment.▸ 聽念法

Email — Yield Drop Escalation

PQA 主管在週一早上發給 fab manager 與工程主管的 email,周末良率掉了。

Subject: [Action Needed] Yield drop on Product X — week 12

Hi all,

Quick update on the yield situation that emerged over the weekend.

Yield came in 6% below the running average on Product X starting Friday night. Affected scope: 4 lots (Q3-201 ~ Q3-204), all currently held at the WAT step.

Preliminary indication is a chamber pressure excursion on Etch tool 07. Equipment team is on it; I'll have a confirmed root cause by end of day.

Containment action: lots held; no shipments at risk.

Will share the 8D draft once root cause is confirmed.

Thanks,
[Name]

相關縮寫:yield · WAT · excursion · 8D

Conf Call — Yield Review Opening (1 minute)

週四下午 yield review 會議,PQA 開場 1 分鐘把現況講清楚。

Thanks everyone for joining. Quick recap before we dive into the deeper data.

Three things on the table this week:

First, yield on Product X came in 4% below the running average. Root cause is identified as a chamber drift on Etch tool 07; recipe was re-cal'd Tuesday, monitoring now.

Second, Cpk on the breakdown voltage parameter has degraded from 1.5 to 1.2 over the last four weeks. Not yet OOS, but trending. PIE is investigating whether this is implant or anneal.

Third, customer Y is asking us to tighten the upper spec limit by 5%. Initial assessment is feasible but will require process re-qual; full impact assessment by next Friday.

OK, let's go to the data.

相關縮寫:yield · Cpk · OOS · PIE · re-qual

Deviation Report — Section 4 (Root Cause)

正式 deviation report 中「Root Cause Analysis」段落的標準寫法。

4.0 Root Cause Analysis

4.1 Symptom
We observed an edge-ring particle pattern (15-30 particles per wafer, ≥0.3 µm) on lot Q3-218 starting at the M2 photo step.

4.2 Investigation Path
- Chamber correlation: pattern correlates strongly with Etch tool 07 chamber B (Pearson r = 0.91, n = 24).
- Pareto: top contributor is post-clean residue (62% of incidents), followed by gas-line micro-leak (28%).
- Cross-section FA on a fail unit confirmed polymer residue at the bottom of the via.

4.3 Root Cause Statement
The defect is attributed to incomplete chamber clean cycle on tool 07-B following the 03/12 PM, based on the SPC trend, chamber correlation, and FA cross-section evidence.

4.4 Containment
- All lots from tool 07-B held at FT (24 lots, ~600 wafers).
- 100% defect inspection on WIP.
- Tool 07-B taken offline for deep clean; re-released after qualification on 03/19.

相關縮寫:pareto · FA · SPC · PM · FT · WIP · qualification

讀完了?來測驗看看記住了沒。